Magnetic field detection device

ABSTRACT

A magnetic field detection device includes a first soft magnetic body, a second soft magnetic body, and a magnetism detection element. The first soft magnetic body extends to have a first length in a first direction, and has a first width, smaller than the first length, in a second direction. The second direction is substantially orthogonal to the first direction. The second soft magnetic body is disposed to be spaced apart from and face the first soft magnetic body in the first direction, extends to have a second length in the first direction, and has a second width, smaller than the second length, in the second direction. The magnetism detection element is disposed, in the first direction, between the first and second soft magnetic bodies, and extends to have a third length in the first direction and a third width, larger than the third length, in the second direction.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/403,879, filed May 6, 2019 which in turn is a continuation of U.S.patent application Ser. No. 15/714,093, filed Sep. 25, 2017, whichclaims the benefit of Japanese Priority Patent Application JP2016-243072filed on Dec. 15, 2016, the entire contents of which are incorporatedherein by reference.

BACKGROUND

The disclosure relates to a magnetic field detection device that detectsa magnetic field using a magnetism detection element.

As a magnetic field detection device that detects an external magneticfield, a magnetic field detection device utilizing a Hall element or amagneto-resistive effect element has been known. For example, referenceis made to International Publication No. WO 2008/146809.

SUMMARY

Incidentally, in recent years, it has been requested to improve acapability of detecting a magnetic field.

It is desirable to provide a magnetic field detection device having amore superior magnetic field detection capability.

A magnetic field detection device according to an embodiment of thedisclosure includes a first soft magnetic body, a second soft magneticbody, and a magnetism detection element. The first soft magnetic bodyextends to have a first length in a first direction, and has a firstwidth in a second direction, that is smaller than the first length. Thesecond direction is substantially orthogonal to the first direction. Thesecond soft magnetic body is disposed to be spaced apart from and facethe first soft magnetic body in the first direction, and extends to havea second length in the first direction. The second soft magnetic bodyhas a second width in the second direction. The second width is smallerthan the second length. The magnetism detection element is disposed, inthe first direction, between the first soft magnetic body and the secondsoft magnetic body. The magnetism detection element extends to have athird length in the first direction and to have a third width in thesecond direction. The third width is larger than the third length.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the disclosure, and are incorporated in and constitutea part of this specification. The drawings illustrate embodiments and,together with the specification, serve to explain the principles of thedisclosure.

FIG. 1A is a schematic perspective view of an overall configuration of amagnetic field detection device according to a first embodiment of thedisclosure.

FIG. 1B is a cross-sectional view of a cross-sectional configuration ofthe magnetic field detection device illustrated in FIG. 1A.

FIG. 1C is a plan view of a planar configuration of the magnetic fielddetection device illustrated in FIG. 1A.

FIG. 2 is an enlarged cross-sectional view of a cross-sectionalconfiguration of a magnetism detection element illustrated in FIG. 1A.

FIG. 3 is a circuit diagram illustrating an example of a signaldetection circuit to be mounted on the magnetic field detection deviceillustrated in FIG. 1A.

FIG. 4 is a schematic perspective view of an overall configuration of amagnetic field detection device according to a second embodiment of thedisclosure.

FIG. 5A is a characteristic diagram illustrating a relationship betweenan aspect ratio and an enhancement rate in a magnetic field detectiondevice of Experimental Examples 1-1 to 1-6.

FIG. 5B is a characteristic diagram illustrating a relationship betweenthe aspect ratio and the number of magnetism detection elements per unitarea in the magnetic field detection device of Experimental Examples 1-1to 1-6.

FIG. 5C is a characteristic diagram illustrating a relationship betweenthe aspect ratio and an exponent FOM in the magnetic field detectiondevice of Experimental Examples 1-1 to 1-6.

FIG. 6A is a characteristic diagram illustrating a relationship betweenan aspect ratio and an enhancement rate in a magnetic field detectiondevice of Experimental Examples 2-1 to 2-6.

FIG. 6B is a characteristic diagram illustrating a relationship betweenthe aspect ratio and the number of magnetism detection elements per unitarea in the magnetic field detection device of Experimental Examples 2-1to 2-6.

FIG. 6C is a characteristic diagram illustrating a relationship betweenthe aspect ratio and the exponent FOM in the magnetic field detectiondevice of Experimental Examples 2-1 to 2-6.

FIG. 7A is a characteristic diagram illustrating a relationship betweenan aspect ratio and an enhancement rate in a magnetic field detectiondevice of Experimental Examples 3-1 to 3-6.

FIG. 7B is a characteristic diagram illustrating a relationship betweenthe aspect ratio and the number of magnetism detection elements per unitarea in the magnetic field detection device of Experimental Examples 3-1to 3-6.

FIG. 7C is a characteristic diagram illustrating a relationship betweenthe aspect ratio and the exponent FOM in the magnetic field detectiondevice of Experimental Examples 3-1 to 3-6.

FIG. 8A is a schematic view of a magnetic field detection deviceaccording to a first modification example.

FIG. 8B is a schematic view of a magnetic field detection deviceaccording to a second modification example.

FIG. 8C is a schematic view of a magnetic field detection deviceaccording to a third modification example.

DETAILED DESCRIPTION

Some embodiments of the disclosure are described below in detail withreference to the accompanying drawings. It is to be noted that thedescription is given in the following order.

1. First Embodiment

An example of a magnetic field detection device including a pair of softmagnetic layers and a magnetism detection element disposed therebetween.

2. Second Embodiment

An example of a magnetic field detection device including, on asubstrate, a plurality of magnetism detection elements each interposedbetween a pair of soft magnetic layers.

3. Experimental Examples 4. Other Modification Examples 1. FirstEmbodiment [Configuration of Magnetic Field Detection Device 1]

First, a description is given, with reference to FIGS. 1A, 1B, and 2,for example, of a configuration example of a magnetic field detectiondevice 1 according to a first embodiment of the disclosure. FIG. 1A is aperspective view of an overall configuration of the magnetic fielddetection device 1. FIG. 1B illustrates a cross-sectional configurationexample of the magnetic field detection device 1 as viewed in an arrowdirection along a line IB-IB illustrated in FIG. 1A. Further, FIG. 1C isa plan view of an overall configuration example of the magnetic fielddetection device 1. FIG. 2 illustrates a cross-sectional configurationexample of a magnetism detection element 20 illustrated in FIGS. 1A and1B.

The magnetic field detection device 1 may be a device that detectspresence or absence, direction, and intensity of an external magneticfield reaching itself, and may be mounted on an electronic compass, forexample. Here, a direction of a magnetic field to be detected such asthe external magnetic field may be, for example, substantiallycoincident with an X-axis direction. The magnetic field detection device1 includes, on a base 10 extending both in the X-axis direction and in aY-axis direction, a pair of soft magnetic layers 11 and 12 and amagnetism detection element 20. The pair of soft magnetic layers 11 and12 are disposed to face each other in the X-axis direction, for example.The magnetism detection element 20 is provided between the soft magneticlayers 11 and 12 in the X-axis direction. The magnetic field detectiondevice 1 may further include leads 21 and 22 that supply a sense currentto the magnetism detection element 20. It is to be noted that FIGS. 1Cand 2 omit illustration of the leads 21 and 22. It is to be noted thatthe X-axis direction is a specific but non-limiting examplecorresponding to a “first direction” of the disclosure, and the Y-axisdirection is a specific but non-limiting example corresponding to a“second direction” of the disclosure. Further, in the presentspecification, a Z-axis direction that is a direction orthogonal to bothof the X-axis direction and the Y-axis direction is also referred to asa thickness direction. [Soft Magnetic Layers 11 and 12]

The soft magnetic layers 11 and 12 may be each substantially a cuboidmember having the X-axis direction as a longitudinal direction. The softmagnetic layers 11 and 12 may be each made of, for example, a softmagnetic metal material having high saturation magnetic flux density,such as a nickel-iron alloy (NiFe). It is to be noted that constituentmaterials of the soft magnetic layers 11 and 12 may be substantially thesame as each other, or may be different from each other.

As illustrated in FIG. 1C, the planar shape in an X-Y plane of the softmagnetic layer 11 may be a rectangular shape, for example. In this case,the soft magnetic layer 11 has a first length LX1 (hereinafter, simplyreferred to as length LX1) along the X-axis direction, and has a firstwidth LY1 (hereinafter, simply referred to as width LY1) along theY-axis direction. Further, as illustrated in FIG. 1B, the soft magneticlayer 11 has a first thickness LZ1 (hereinafter, simply referred to asthickness LZ1) along the Z-axis direction. The length LX1 may be, forexample, equal to or smaller than 100 μm, and may be preferably about 12μm. The width LY1 may be, for example, equal to or smaller than 100 andmay be preferably about 4 μm. Further, the thickness LZ1 may be, forexample, equal to or smaller than 10 μm, and may be preferably a sizesmaller than those of both of the length LX1 and the width LY1.

As illustrated in FIG. 1C, the planar shape in the X-Y plane of the softmagnetic layer 12 may be a rectangular shape, for example, similarly tothe soft magnetic layer 11. In this case, the soft magnetic layer 12 hasa second length LX2 (hereinafter, simply referred to as length LX2)along the X-axis direction, and has a second width LY2 (hereinafter,simply referred to as width LY2) along the Y-axis direction. Further, asillustrated in FIG. 1B, the soft magnetic layer 12 has a secondthickness LZ2 (hereinafter, simply referred to as thickness LZ2) alongthe Z-axis direction. The length LX2 may be, for example, equal to orsmaller than 100 and may be preferably about 12 The width LY2 may be,for example, equal to or smaller than 100 and may be preferably about 4Further, the thickness LZ2 may be, for example, equal to or smaller than10 and may be preferably a size smaller than those of both of the lengthLX2 and the width LY2.

[Magnetism Detection Element 20]

As the magnetism detection element 20, for example, a magneto-resistiveeffect (MR) element may be used that exhibits a resistance changedepending on a direction and intensity of the external magnetic field.As illustrated in FIG. 1C, the planar shape in the X-Y plane of themagnetism detection element 20 may be an elliptical shape, for example.In this case, the magnetism detection element 20 has a third length LX3(hereinafter, simply referred to as length LX3) along the X-axisdirection, and has a third width LY3 (hereinafter, simply referred to aswidth LY3) along the Y-axis direction. Further, as illustrated in FIG.1B, the magnetism detection element 20 has a third thickness LZ3(hereinafter, simply referred to as thickness LZ3) along the Z-axisdirection. The planar shape of the magnetism detection element 20 is notlimited to the elliptical shape, and may be, for example, a rectangularshape, an oval shape, or a rhomboidal shape.

As illustrated in FIG. 2, for example, the magnetism detection element20 may be a CPP (current perpendicular to plane) MR element having aspin-valve structure in which a plurality of functional films includinga magnetic layer are stacked; a sense current flows in a layer-stackingdirection in which the functional films are stacked inside the magnetismdetection element 20. More specifically, as illustrated in FIG. 2, themagnetism detection element 20 may include a stacked body in which anantiferromagnetic layer 31, a magnetization pinned layer 32, anintermediate layer 33, and a magnetization free layer 34 are stacked inorder. The magnetization pinned layer 32 has magnetization pinned in acertain direction. The intermediate layer 33 does not exhibit a specificmagnetization direction. The magnetization free layer 34 hasmagnetization varying in accordance with the external magnetic field. Itis to be noted that the antiferromagnetic layer 31, the magnetizationpinned layer 32, the intermediate layer 33, and the magnetization freelayer 34 may each have a single-layer structure or a multi-layerstructure configured by a plurality of layers. In such an MR element,the resistance change may occur in accordance with a change in themagnetic flux along a film plane (X-Y plane) orthogonal to thelayer-stacking direction (e.g., Z-axis direction).

The antiferromagnetic layer 31 may be made of an antiferromagneticmaterial such as a platinum-manganese alloy (PtMn) and aniridium-manganese alloy (IrMn). The antiferromagnetic layer 31 is in astate, for example, in which a spin magnetic moment in a directionsubstantially the same as an orientation of the magnetization of theadjacent magnetization pinned layer 32 and a spin magnetic moment in adirection directly opposite thereto completely cancel each other, andserves to fix the orientation of the magnetization pinned layer 32 intoa certain direction.

The magnetization pinned layer 32 may be made of, for example, aferromagnetic material such as cobalt (Co), a cobalt-iron alloy (CoFe),and a cobalt-iron-boron alloy (CoFeB). In the present embodiment, themagnetization direction of the magnetization pinned layer 32 may bedesirably coincident with the X-axis direction.

In a case where the magnetism detection element 20 is a magnetic tunneljunction (MTJ) element, the intermediate layer 33 may be a non-magnetictunnel barrier layer made of a magnesium oxide (MgO), for example, andmay have a thickness that is thin to the extent that a tunnel currentbased on quantum mechanics is able to pass therethrough. The tunnelbarrier layer made of MgO may be obtained by a process such as a processof oxidizing a thin film made of magnesium (Mg) and a reactivesputtering process in which sputtering of magnesium is performed underan oxygen atmosphere, besides a sputtering process that uses a targetmade of MgO, for example. It is also possible to configure theintermediate layer 33 with use of an oxide or a nitride of each ofaluminum (Al), tantalum (Ta), and hafnium (Hf), besides MgO. In a casewhere the magnetism detection element 20 is a giant magnetoresistive(GMR) element, for example, the intermediate layer 33 may be made of anon-magnetic highly-electroconductive material such as copper (Cu),ruthenium (Ru) and gold (Au).

The magnetization free layer 34 may be a soft ferromagnetic layer, andmay have, for example, a magnetization easy axis substantiallyorthogonal to the orientation of the magnetization of the magnetizationpinned layer 32. The magnetization free layer 34 may be made of amaterial such as a cobalt-iron alloy (CoFe), a nickel-iron alloy (NiFe),and a cobalt-iron-boron alloy (CoFeB). In the present embodiment, thedirection of the magnetization easy axis of the magnetization free layer34 may be desirably coincident with the Y-axis. When the length LX3 issmaller than the width LY3 in the magnetism detection element 20, itbecomes easy to allow the direction of the magnetization easy axis ofthe magnetization free layer 34 to be coincident with the Y-axisdirection.

[Leads 21 and 22]

The lead 21 extends on the X-Y plane to be brought into contact with apart (e.g., a top surface of the magnetization free layer 34) of themagnetism detection element 20. The lead 22 extends on the X-Y plane tobe brought into contact with any other part (e.g., an undersurface ofthe antiferromagnetic layer 31) of the magnetism detection element 20.The leads 21 and 22 may be made of, for example, ahighly-electroconductive non-magnetic material such as copper andaluminum (Al).

Here, the width LY3 of the magnetism detection element 20 may besubstantially the same as one or both of the width LY1 of the softmagnetic layer 11 and the width LY2 of the soft magnetic layer 12, ormay be substantially narrower than one or both of the width LY1 and thewidth LY2. In particular, the width LY3 may preferably have a sizesubstantially equal to or smaller than both of the width LY1 and thewidth LY2. In other words, it is desirable to satisfy one or both of thefollowing conditional expressions (1) and (2).

LY3≤LY1  (1)

LY3≤LY2  (2)

In the present embodiment, the width LY1 and the width LY2 may bedesirably substantially the same as each other. The width LY1 and thewidth LY2 may be each about 4 μm, for example.

In the present embodiment, a spacing XG between the soft magnetic layers11 and 12 may be desirably narrower than any of the widths LY1 to LY3(see FIG. 1C). The spacing XG may be, for example, about 0.4 μm.

In the present embodiment, the length LX1 may be preferably larger thanthe width LY1 in the soft magnetic layer 11, and the length LX2 may bepreferably larger than the width LY2 in the soft magnetic layer 12.Further, the length LX3 may be preferably smaller than the width LY3 inthe magnetism detection element 20. Here, when each of the width LY1 andthe width LY 2 ranges, for example, 10 μm to 100 μm, it is desirable tosatisfy the following conditional expressions (3) and (4). The lengthLX1 may be substantially the same as the length LX2.

3≤LX1/LY1≤20  (3)

3≤LX2/LY2≤20  (4)

In the present embodiment, as illustrated in FIG. 1C, the thickness LZ3of the magnetism detection element 20 may be preferably equal to orsmaller than one or both of the thickness LZ1 and the thickness LZ2.

In the present embodiment, the magnetism detection element 20 may bepreferably disposed on an extension of the soft magnetic layer 11 in theX-axis direction, or may be preferably disposed on an extension of thesoft magnetic layer 12 in the X-axis direction. Alternatively, themagnetism detection element 20 may be disposed on the extensions of bothof the soft magnetic layers 11 and 12 in the X-axis direction.

[Signal Detection Circuit]

The magnetic field detection device 1 may include, for example, a signaldetection circuit illustrated in FIG. 3. The signal detection circuitmay include, for example, a voltage application section 101, themagnetism detection element 20, a resistance change detector 102, and asignal processor 103. The voltage application section 101 and theresistance change detector 102 may be coupled to the magnetism detectionelement 20. The signal processor 103 may be coupled to the resistancechange detector 102.

[Workings and Effects of Magnetic Field Detection Device 1]

In the magnetic field detection device 1, an output in accordance withthe external magnetic field that reaches the magnetic field detectiondevice 1 is obtained by the above-described signal detection circuit.More specifically, in the above-described signal detection circuit, thevoltage application section 101 applies a predetermined voltage betweenthe leads 21 and 22 to thereby cause a sense current to flow thatcorresponds to an electric resistance of the magnetism detection element20 at that time. The electric resistance of the magnetism detectionelement 20 varies depending on a magnetization state of the magnetismdetection element 20, i.e., depending on the orientation of themagnetization of the magnetization free layer 34 with respect to theorientation of the magnetization of the magnetization pinned layer 32.The sense current flowing through the magnetism detection element 20 isdetected by the resistance change detector 102, and the resistancechange detector 102 outputs, to the signal processor 103, a signal basedon the electric resistance of the magnetism detection element 20detected by the resistance change detector 102. Further, a signalgenerated in the signal processor 103 on the basis of the output fromthe resistance change detector 102 is outputted to the outside. Thismakes it possible to obtain, from the signal detection circuit, anoutput in accordance with the external magnetic field that reaches themagnetic field detection device 1.

In the magnetic field detection device 1 according to the presentembodiment, the soft magnetic layers 11 and 12 each having the X-axisdirection as the longitudinal direction are disposed side by side andspaced apart from each other in the X-axis direction. Further, themagnetism detection element 20 having, as the longitudinal direction,the Y-axis direction orthogonal to the X-axis direction is disposedbetween the soft magnetic layers 11 and 12. This allows both the softmagnetic layers 11 and 12 to behave as a magnetic yoke. As a result,when the external magnetic field along the X-axis direction is appliedto the magnetic field detection device 1, for example, an externalmagnetic field component F (see FIGS. 1B and 1C), along the X-axisdirection, that reaches the magnetism detection element 20 is enhancedby the soft magnetic layers 11 and 12. Thus, it is possible for themagnetic field detection device 1 to exhibit a high magnetic fielddetection capability. In the magnetism detection element 20, coincidenceof the magnetization direction of the magnetization pinned layer 32 withthe X-axis direction and coincidence of the magnetization easy axisdirection of the magnetization free layer 34 with the Y-axis directionallow the soft magnetic layers 11 and 12 to be disposed along a sensingdirection. Thus, it becomes possible for the magnetic field detectiondevice 1 to exhibit a higher magnetic field detection capability.

2. Second Embodiment

A description is given next, with reference to FIG. 4, of aconfiguration of a magnetic field detection device 1A according to asecond embodiment of the disclosure. FIG. 4 is a perspective view of anoverall configuration example of the magnetic field detection device 1A.

The magnetic field detection device 1A according to the presentembodiment includes, on the base 10, a plurality of magnetism detectionelements 20 and a plurality of soft magnetic layers 11 and 12.Accordingly, a plurality of leads 21 and 22 are also provided. Exceptthese points, the magnetic field detection device 1A has substantiallysimilar configurations to those of the magnetic field detection device 1according to the foregoing first embodiment.

More specifically, as illustrated in FIG. 4, on the base 10, the softmagnetic layers 11 and 12 arranged alternately with an interspacetherebetween in the X-axis direction are provided in two columns to beadjacent to each other in the Y-axis direction. Further, one magnetismdetection element 20 is disposed in each interspace between the softmagnetic layers 11 and 12 in the X-axis direction. Although FIG. 4exemplifies six magnetism detection elements 20 arranged in two rows andthree columns, and a total of eight soft magnetic layers 11 and 12disposed to interpose the six magnetism detection elements 20therebetween, the number and the form of the arrangement of themagnetism detection elements 20 and the soft magnetic layers 11 and 12are not limited to those illustrated in FIG. 4. However, all of theplurality of magnetism detection elements 20 may be preferably providedin identical level. The plurality of magnetism detection elements 20 maybe coupled serially as a whole through the plurality of leads 21 and 22,for example. This configuration makes it possible to increase the entireoutput in the magnetic field detection device 1A, as compared with thatof the magnetic field detection device 1.

3. Experimental Examples 3.1 Experimental Examples 1-1 to 1-6

Next, an external magnetic field of 0.1 mT was applied to the magneticfield detection device 1 illustrated in FIG. 1A in a +X direction, and amagnetic field intensity on the line IB-IB illustrated in FIG. 1A wasdetermined to calculate an enhancement rate of the magnetic fielddetection device 1. The enhancement rate [%] is a ratio of the magneticfield intensity of the magnetism detection element 20 on the line IB-IBin FIG. 1A to the intensity of the applied external magnetic field.Here, the widths LY1 and LY2 were both set at 10 μm in each ofExperimental Examples 1-1 to 1-6. Meanwhile, the lengths LX1 and LX2were both set at 10 μm in Experimental Example 1-1, 30 μm inExperimental Example 1-2, 100 μm in Experimental Example 1-3, 200 μm inExperimental Example 1-4, 400 μm in Experimental Example 1-5, and 1,400μm in Experimental Example 1-6. In other words, aspect ratios LX1/LY1and LX2/LY2 (hereinafter, referred to collectively as the aspect ratioLX/LY) was set at 1 (one) in Experimental Example 1-1, 3 in ExperimentalExample 1-2, 10 in Experimental Example 1-3, 20 in Experimental Example1-4, 40 in Experimental Example 1-5, and 140 in Experimental Example1-6. The spacing XG was set at 5 μm in all of the Experimental Examples.The thicknesses LZ1 and LZ2 were both set at 1 (one) μm in all of theExperimental Examples.

Simulation results of Experimental Examples 1-1 to 1-6 are illustratedin FIG. 5A. In FIG. 5A, the horizontal axis indicates the aspect ratioLX/LY [−], and the vertical axis indicates the enhancement rate [%]. Asillustrated in FIG. 5A, it was found that the increase in the aspectratio caused the enhancement rate to be increased in a manner ofexponential function.

On the other hand, the increase in the aspect ratio causes decrease in aregion on the base 10 where the magnetism detection elements 20 aremountable. FIG. 5B illustrates a relationship between the aspect ratioLX/LY [−] and the number of the magnetism detection elements 20mountable per unit area on the base 10 in Experimental Examples 1-1 to1-6. In FIG. 5B, the horizontal axis indicates the aspect ratio LX/LY[−], and the vertical axis indicates a square root of the number of themagnetism detection elements mountable per unit area [1/μm²]. Asillustrated in FIG. 5B, it was found that the increase in the aspectratio caused the square root of the number of the magnetism detectionelements mountable per unit area to be decreased in a manner ofexponential function.

Resolution that represents a capability of the magnetism detectionelement is determined by the following expression (5).

Resolution [T]=Noise Voltage [V]/Magnetic Sensitivity [V/T]  (5)

Here, the noise voltage is proportional to a square root of an areaoccupied by the magnetism detection elements, whereas the magneticsensitivity is proportional to the enhancement rate. Thus, in a case ofconsidering an advantage of disposing, on the base, the soft magneticlayers together with the magnetism detection elements, it is desirableto taking account of, as a judging material, an exponent FOM (factor ofmerits) defined as in the expression (6) below. The exponent FOM denotesan advantage of disposing the soft magnetic layers together with themagnetism detection elements. The merit is determined by a relationshipbetween the enhancement rate varied by the presence of the soft magneticlayers and a numerical value that indicates how many magnetism detectionelements are able to be disposed per unit area on the base, i.e., thenumber of the magnetism detection elements mountable per unit area.

(FOM)=(Enhancement Rate)*(Number of Magnetism Detection ElementsMountable Per Unit Area)^(0.5)  (6)

The relationship between the exponent FOM defined as above and theaspect ratio is illustrated in FIG. 5C. In FIG. 5C, the horizontal axisindicates the aspect ratio LX/LY [−], and the vertical axis indicatesthe exponent FOM [arb. unit]. As illustrated in FIG. 5C, it was foundthat high exponent FOM was obtained in a case of the aspect ratioranging from 3 to 20. In other words, it was found that the magneticfield detection device 1 allowed for obtainment of more favorableresolution in a case of the aspect ratio ranging from 3 to 20.

3.2 Experimental Examples 2-1 to 2-6

Next, evaluations similar to those in Experimental Examples 1-1 to 1-6were performed under conditions similar to those in ExperimentalExamples 1-1 to 1-6 except that the spacing XG was set at 10 μm. Theresults are illustrated in each of FIGS. 6A to 6C. It is to be notedthat FIGS. 6A to 6C illustrate results that correspond, respectively, tothose of FIGS. 5A to 5C.

As illustrated in FIGS. 6A to 6C, it was found that, also inExperimental Examples 2-1 to 2-6, more favorable resolution was obtainedin the case of the aspect ratio ranging from 3 to 20.

3.3 Experimental Examples 3-1 to 3-6

Next, evaluations similar to those in Experimental Examples 1-1 to 1-6were performed under conditions similar to those in ExperimentalExamples 1-1 to 1-6 except the following points. That is, the widths LY1and LY2 were both set at 100 μm; the lengths LX1 and LX2 were both setat 100 μm in Experimental Example 3-1, 300 μm in Experimental Example3-2, 1,000 μm in Experimental Example 3-3, 2,000 μm in ExperimentalExample 3-4, 4,000 μm in Experimental Example 3-5, and 14,000 μm inExperimental Example 3-6; and the spacing XG was set at 50 μm. Theresults are illustrated in each of FIGS. 7A to 7C. It is to be notedthat FIGS. 7A to 7C illustrate results that correspond, respectively, tothose of FIGS. 5A to 5C.

As illustrated in FIGS. 7A to 7C, it was found that, also inExperimental Examples 3-1 to 3-6, more favorable resolution was obtainedin the case of the aspect ratio ranging from 3 to 20.

4. Modification Examples

The disclosure has been described hereinabove referring to someembodiments. However, the disclosure is not limited to such embodiments,and may be modified in various ways. For example, each diagramillustrates a case where the soft magnetic layers 11 and 12 havesubstantially the same size; however, the soft magnetic layers 11 and 12may have different sizes. Further, embodiments of the disclosure is notlimited to a case where the width LY3 is equal to or smaller than bothof the widths LY1 and LY2 as illustrated in FIG. 1C. Embodiments of thedisclosure also encompasses a case where the width LY3 is equal to orsmaller than one of the widths LY1 and LY2, and a case where the widthLY3 is larger than both of the widths LY1 and LY2.

The foregoing embodiments describe a case where all of the magnetismdetection element 20 and the leads 21 and 22 are present in the samelevel as that of the soft magnetic layers 11 and 12 as illustrated inFIG. 1B; however, the disclosure is not limited thereto. The disclosuremay also include, for example, a configuration in which all of themagnetism detection element 20 and the leads 21 and 22 are present in alevel different from that of the soft magnetic layers 11 and 12 as in amagnetic field detection device 1B illustrated in FIG. 8A. In themagnetic field detection device 1B, a gap ZG between the lead 21 andeach of the soft magnetic layers 11 and 12 may be 10 μm, for example.Further, in the disclosure, for example, each of the leads 21 and 22 maybe present in a level different from that of the soft magnetic layers 11and 12, with only the magnetism detection element 20 being present inthe same level as that of the soft magnetic layers 11 and 12, as in amagnetic field detection device 1C illustrated in FIG. 8B. Further, inembodiments of the disclosure, for example, the soft magnetic layers 11and 12 may be present in levels different from each other as in amagnetic field detection device 1D illustrated in FIG. 8C.

Descriptions have been given, in the foregoing embodiments, byexemplifying, as the magnetism detection element, the CPP MR elementhaving the spin-valve structure; however, the disclosure is not limitedthereto. For example, a CIP (current in plane) MR element or themagnetic tunnel junction element (MTJ element) may be used as themagnetism detection element. Alternatively, a sensor may also be used,such as a magnetism detection element (e.g., Hall element) having thesensing direction as the X-axis direction, other than the MR element.

Moreover, the disclosure encompasses any possible combination of some orall of the various embodiments and the modification examples describedherein and incorporated herein.

It is possible to achieve at least the following configurations from theabove-described example embodiments of the disclosure.

(1) A magnetic field detection device including:

a first soft magnetic body that extends to have a first length in afirst direction, and has a first width in a second direction, that issmaller than the first length, the second direction being substantiallyorthogonal to the first direction;

a second soft magnetic body that is disposed to be spaced apart from andface the first soft magnetic body in the first direction, and extends tohave a second length in the first direction, the second soft magneticbody having a second width in the second direction, the second widthbeing smaller than the second length; and

a magnetism detection element that is disposed, in the first direction,between the first soft magnetic body and the second soft magnetic body,and extends to have a third length in the first direction and to have athird width in the second direction, the third width being larger thanthe third length.

(2) The magnetic field detection device according to (1), in which thethird width is equal to or smaller than one or both of the first widthand the second width.(3) The magnetic field detection device according to (2), in which thethird width is equal to or smaller than both of the first width and thesecond width.(4) The magnetic field detection device according to (2) or (3), inwhich the first width and the second width are substantially same aseach other.(5) The magnetic field detection device according to any one of (1) to(4), in which a spacing between the first soft magnetic body and thesecond soft magnetic body is narrower than the third width.(6) The magnetic field detection device according to any one of (1) to(5), in which

a ratio of the first length to the first width ranges from 3 to 20, and

a ratio of the second length to the second width ranges from 3 to 20.

(7) The magnetic field detection device according to any one of (1) to(6), in which each of the first width and the second width ranges from10 μm to 100 μm.(8) The magnetic field detection device according to any one of (1) to(7), in which the first length and the second length are substantiallysame as each other.(9) The magnetic field detection device according to any one of (1) to(8), in which

the first soft magnetic body has a first thickness in a third directionthat is substantially orthogonal to both of the first direction and thesecond direction,

the second soft magnetic body has a second thickness in the thirddirection, and

the magnetism detection element has a third thickness in the thirddirection, the third thickness being equal to or smaller than one orboth of the first thickness and the second thickness.

(10) The magnetic field detection device according to any one of (1) to(9), in which the magnetism detection element is disposed, in the firstdirection, on an extension of the first soft magnetic body, on anextension of the second soft magnetic body, or on the extensions of bothof the first soft magnetic body and the second soft magnetic body.(11) The magnetic field detection device according to any one of (1) to(10), in which a direction of a magnetic field to be detected issubstantially coincident with the first direction.(12) The magnetic field detection device according to any one of (1) to(11), in which the magnetism detection element includes amagneto-resistive effect element, the magneto-resistive effect elementincluding:

a magnetization pinned layer having a magnetization directionsubstantially coincident with the first direction;

an intermediate layer; and

a magnetization free layer having a magnetization easy axissubstantially coincident with the second direction.

In the magnetic field detection device according to the embodiment ofthe disclosure, the third width may be preferably equal to or smallerthan one or both of the first width and the second width. Morepreferably, the third width may be equal to or smaller than both of thefirst width and the second width. Further, the first width and thesecond width may be substantially same as each other. Furthermore, aspacing between the first soft magnetic body and the second softmagnetic body may be narrower than the third width.

In the magnetic field detection device according to the embodiment ofthe disclosure, each of the first width and the second width may rangefrom 10 μm to 100 μm, for example. A ratio of the first length to thefirst width may range from 3 to 20, for example, and a ratio of thesecond length to the second width may range from 3 to 20, for example.The first length and the second length may be substantially same as eachother.

In the magnetic field detection device according to the embodiment ofthe disclosure, the first soft magnetic body may have a first thicknessin a third direction that is substantially orthogonal to both of thefirst direction and the second direction. The second soft magnetic bodymay have a second thickness in the third direction. The magnetismdetection element may have a third thickness in the third direction. Thethird thickness is equal to or smaller than one or both of the firstthickness and the second thickness.

In the magnetic field detection device according to the embodiment ofthe disclosure, the magnetism detection element may be disposed, in thefirst direction, on an extension of the first soft magnetic body, on anextension of the second soft magnetic body, or on the extensions of bothof the first soft magnetic body and the second soft magnetic body.Further, a direction of a magnetic field to be detected may besubstantially coincident with the first direction, for example

In the magnetic field detection device according to one embodiment ofthe disclosure, the first soft magnetic body and the second softmagnetic body each having the first direction as a longitudinaldirection are disposed to be spaced apart from each other. The magnetismdetection element having, as a longitudinal direction, the seconddirection orthogonal to the first direction is disposed between thefirst soft magnetic body and the second soft magnetic body. Thus, thefirst soft magnetic body and the second soft magnetic body both behaveas a magnetic yoke to enhance the external magnetic field componentalong the first direction, for example.

According to the magnetic field detection device as one embodiment ofthe disclosure, the first soft magnetic body and the second softmagnetic body each function as the magnetic yoke, thus making itpossible to enhance the magnetic field to be detected. Thus, accordingto the magnetic field detection device as the embodiment of thedisclosure, it is possible to exhibit a high magnetic field detectioncapability.

Although the disclosure has been described in terms of exemplaryembodiments, it is not limited thereto. It should be appreciated thatvariations may be made in the described embodiments by persons skilledin the art without departing from the scope of the disclosure as definedby the following claims. The limitations in the claims are to beinterpreted broadly based on the language employed in the claims and notlimited to examples described in this specification or during theprosecution of the application, and the examples are to be construed asnon-exclusive. For example, in this disclosure, the term “preferably”,“preferred” or the like is non-exclusive and means “preferably”, but notlimited to. The use of the terms first, second, etc. do not denote anyorder or importance, but rather the terms first, second, etc. are usedto distinguish one element from another. The term “substantially” andits variations are defined as being largely but not necessarily whollywhat is specified as understood by one of ordinary skill in the art. Theterm “about” as used herein can allow for a degree of variability in avalue or range. Moreover, no element or component in this disclosure isintended to be dedicated to the public regardless of whether the elementor component is explicitly recited in the following claims.

What is claimed is:
 1. A magnetic field detection device comprising: afirst soft magnetic body magnetic collection region that extends to havea first length in a first direction, and has a first width in a seconddirection, the first width being smaller than the first length, thesecond direction being substantially orthogonal to the first direction;a second soft magnetic body magnetic collection region that is disposedto be spaced apart from and face the first soft magnetic body magneticcollection region in the first direction, and extends to have a secondlength in the first direction, the second soft magnetic body having asecond width in the second direction, the second width being smallerthan the second length; a magnetism detection element that is disposedin a magnetically affected area where both the first soft magnetic bodymagnetic collection region and the second soft magnetic body magneticcollection region are magnetically affected, and extends to have a thirdlength in the first direction and to have a third width in the seconddirection, the third length being smaller than both of the first lengthand the second length, the third width being larger than the thirdlength and being equal to or smaller than both of the first width andthe second width; and a first lead and a second lead that are disposedto sandwich the magnetism detection element in a third direction, thethird direction being substantially orthogonal to both of the firstdirection and the second direction; wherein the magnetism detectionelement, the first lead, and the second lead are disposed in a levelthat is different from a level includes both of the first soft magneticbody and the second soft magnetic body.
 2. A magnetic field detectiondevice comprising: a first soft magnetic body magnetic collection regionthat extends to have a first length in a first direction, and has afirst width in a second direction, the first width being smaller thanthe first length, the second direction being substantially orthogonal tothe first direction; a second soft magnetic body magnetic collectionregion that is disposed to be spaced apart from and face the first softmagnetic body magnetic collection region in the first direction, andextends to have a second length in the first direction, the second softmagnetic body having a second width in the second direction, the secondwidth being smaller than the second length; a magnetism detectionelement that is disposed in a magnetically affected area where both thefirst soft magnetic body magnetic collection region and the second softmagnetic body magnetic collection region are magnetically affected, andextends to have a third length in the first direction and to have athird width in the second direction, the third length being smaller thanboth of the first length and the second length, the third width beinglarger than the third length and being equal to or smaller than both ofthe first width and the second width; and a first lead and a second leadthat are disposed to sandwich the magnetism detection element in a thirddirection, the third direction being substantially orthogonal to both ofthe first direction and the second direction; wherein at least one ofthe magnetism detection element, the first lead, and the second lead isdisposed in a level that includes one or both of the first soft magneticbody and the second soft magnetic body.
 3. A magnetic field detectiondevice comprising: a first soft magnetic body that extends to have afirst length in a first direction, and has a first width in a seconddirection, the first width being smaller than the first length, thesecond direction being substantially orthogonal to the first direction;a second soft magnetic body that is disposed to be spaced apart from andface the first soft magnetic body in the first direction, and extends tohave a second length in the first direction, the second soft magneticbody having a second width in the second direction, the second widthbeing smaller than the second length; a magnetism detection element thatis disposed, in the first direction, between the first soft magneticbody and the second soft magnetic body, and extends to have a thirdlength in the first direction and to have a third width in the seconddirection, the third width being larger than the third length; and afirst lead and a second lead that are disposed to sandwich the magnetismdetection element in a third direction, the third direction beingsubstantially orthogonal to both of the first direction and the seconddirection; wherein the magnetism detection element, the first lead, andthe second lead are disposed in a level that is different from a levelincludes both of the first soft magnetic body and the second softmagnetic body.
 4. A magnetic field detection device comprising: a firstsoft magnetic body that extends to have a first length in a firstdirection, and has a first width in a second direction, the first widthbeing smaller than the first length, the second direction beingsubstantially orthogonal to the first direction; a second soft magneticbody that is disposed to be spaced apart from and face the first softmagnetic body in the first direction, and extends to have a secondlength in the first direction, the second soft magnetic body having asecond width in the second direction, the second width being smallerthan the second length; a magnetism detection element that is disposed,in the first direction, between the first soft magnetic body and thesecond soft magnetic body, and extends to have a third length in thefirst direction and to have a third width in the second direction, thethird width being larger than the third length; and a first lead and asecond lead that are disposed to sandwich the magnetism detectionelement in a third direction, the third direction being substantiallyorthogonal to both of the first direction and the second direction;wherein at least one of the magnetism detection element, the first lead,and the second lead is disposed in a level that includes one or both ofthe first soft magnetic body and the second soft magnetic body.
 5. Amagnetic field detection device comprising: a soft magnetic bodymagnetic collection region that extends to have a first length in afirst direction, and has a first width in a second direction, the firstwidth being smaller than the first length, the second direction beingsubstantially orthogonal to the first direction; and a magnetismdetection element that is disposed in a magnetically affected area wherethe soft magnetic body magnetic collection region is magneticallyaffected, and extends to have a third length in the first direction andto have a third width in the second direction, the third length beingsmaller than the first length, the third width being larger than thethird length and being equal to or smaller than the first width.
 6. Themagnetic field detection device according to claim 5 further comprisinga first lead and a second lead that are disposed to sandwich themagnetism detection element in a third direction, the third directionbeing substantially orthogonal to both of the first direction and thesecond direction; wherein the magnetism detection element, the firstlead, and the second lead are disposed in a level that is different froma level includes the soft magnetic body magnetic collection region. 7.The magnetic field detection device according to claim 5 furthercomprising a first lead and a second lead that are disposed to sandwichthe magnetism detection element in a third direction, the thirddirection being substantially orthogonal to both of the first directionand the second direction; wherein at least one of the magnetismdetection element, the first lead, and the second lead is disposed in alevel that includes the soft magnetic body magnetic collection region.8. A magnetic field detection device comprising: a soft magnetic bodythat extends to have a first length in a first direction, and has afirst width in a second direction, the first width being smaller thanthe first length, the second direction being substantially orthogonal tothe first direction; a magnetism detection element that is disposedadjacent to the soft magnetic body in the first direction, and extendsto have a third length in the first direction and to have a third widthin the second direction, the third width being larger than the thirdlength.
 9. The magnetic field detection device according to claim 8further comprising a first lead and a second lead that are disposed tosandwich the magnetism detection element in a third direction, the thirddirection being substantially orthogonal to both of the first directionand the second direction; wherein the magnetism detection element, thefirst lead, and the second lead are disposed in a level that isdifferent from a level includes the soft magnetic body.
 10. The magneticfield detection device according to claim 8 further comprising a firstlead and a second lead that are disposed to sandwich the magnetismdetection element in a third direction, the third direction beingsubstantially orthogonal to both of the first direction and the seconddirection; wherein at least one of the magnetism detection element, thefirst lead, and the second lead is disposed in a level that includes thesoft magnetic body.
 11. The magnetic field detection device according toclaim 5, wherein a direction of a magnetic field to be detected issubstantially coincident with the first direction.
 12. The magneticfield detection device according to claim 8, wherein a direction of amagnetic field to be detected is substantially coincident with the firstdirection.
 13. The magnetic field detection device according to claim 5,wherein the magnetism detection element comprises a magneto-resistiveeffect element, the magneto-resistive effect element including: amagnetization pinned layer having a magnetization directionsubstantially coincident with the first direction; an intermediatelayer; and a magnetization free layer having a magnetization easy axissubstantially coincident with the second direction.
 14. The magneticfield detection device according to claim 8, wherein the magnetismdetection element comprises a magneto-resistive effect element, themagneto-resistive effect element including: a magnetization pinned layerhaving a magnetization direction substantially coincident with the firstdirection; an intermediate layer; and a magnetization free layer havinga magnetization easy axis substantially coincident with the seconddirection.